SEMATECH DOC ID #: 99083804A-TR

Title: Front Opening Unified Pod (FOUP) Fire Protection: A General Overview

Author(s): Craig Ottesen;

Document date: 11/02/1999

Descriptor(s): equipment safety;plastics;wafer carriers;FOUP;

Abstract:  This document is a white paper identifying some of the key issues and
questions concerning the use of plastics (specifically front opening unified
pods [FOUPs] stored in stockers) in the future 300 mm factories.

To Document

© Copyright 2009 SEMATECH, Inc.
Please read these important Trademark and legal notices