SEMATECH DOC ID #: 99083803A-TR

Title: Guidelines for I300I Environmental, Safety & Health (ESH) Equipment Specific Environmental Information and Environmental Impact

Author(s): Craig Ottesen;David Carswell;

Document date: 11/02/1999

Descriptor(s): 300 mm wafers;equipment safety;equipment characterization;emissions;

Abstract:  This document is a white paper on the distinctions between the requirements
of a formal Environmental Impact Study and an Emissions Characterization
Study.

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