SEMATECH DOC ID #: 99073793A-TR

Title: Automated Material Handling System (AMHS) Framework Document: Version 1.0

Author(s): Karl Gartland;Satoshi Kono;

Document date: 09/03/1999

Descriptor(s): 300 mm wafers;stockers;wafer transport;standards;specifications;safety;frameworks;CIM;

Abstract:  Three-hundred mm wafer fabrication factories will require the baseline
capabilities of stocker storage and interbay transport. In addition to these
baseline capabilities, intrabay transport will be added as a result of
ergonomic and safety requirements brought about by the increased size and
weight of 300 mm wafer carriers. To realize the full vision of cost-
effective automated carrier transfer to and from production equipment, these
stocker, interbay transport, and intrabay transport systems will be required
to be fully integrated with each other and the factory host system in the 300
mm wafer fabrication factory .

The International 300 mm Initiative (I300I) and J300E have published Global
Joint Guidance (GJG) item 6.2, "AMHS Framework," which requires a SEMI
standard to be developed that specifies the minimum functionality of the AMHS
integration system and its interface to the factory host system. The purpose
of this document is to record the requirements of such a standard, as jointly
defined by the J300E Computer Integrated Manufacturing (CIM) Planning group
and the I300I CIM Study Group. Please note that this document does not
represent full consensus of all I300I/J300E companies. However, it is deemed
useful as guidance to suppliers of equipment and factory systems and
standards developers, and was approved for publication by the I300I Factory
Integration Working Group.

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