SEMATECH DOC ID #: 98123623A-ENG

Title: Process Compatibility Parameters for Wet Bench Plastic Materials

Author(s): Archibald Tewarson;Avtar S. Jassal;Latif Ahmed;Mark Camenzind;

Document date: 12/28/1998

Descriptor(s): construction materials;materials testing;contamination control;outgassing;wet stations;bulk chemicals;ultrapure water;

Abstract:  This report presents a test protocol of accepted analytical procedures to
determine the process compatibility parameters for commonly used wet bench
plastic materials (PP, FRPP, and PVC) and proposed plastic materials (CPVC,
ECTFE, and PVDF) that may be used for wet bench construction. Three industry
standard test methods were used to determine the outgassing, leaching, and
extraction parameters, defined in combination as the process compatibility
parameters. To supplement them, the presence of critical elements at the
surface of the materials and the condition of the surface were examined
before and after exposure to water and chemicals. Changes in the mass of
plastic materials as a result of outgassing, leaching, and extraction were
also used to supplement the parameters. The report includes details of the
test procedures, data analysis, surface topography of the plastic materials,
before and after exposure to water and chemicals, and discussion of the
results.

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