SEMATECH DOC ID #: 98123605A-ENG

Title: Evaluation of a Litmas

Author(s): David Graves;Eric J. Tonnis;Laurie Beu;Rusty Jewett;Tom Lii;Victor Vartanian;

Document date: 12/11/1998

Descriptor(s): perfluorocompounds;pollution control equipment;emissions reduction;point of use abatement;Fourier transform infrared spectroscopy;cost of ownership;plasma etching;dielectric etching;

Abstract:  Using Fourier transform infrared spectrometry (FTIR) and quadrupole mass
spectrometry (QMS) as diagnostic tools, the destruction and removal
efficiency (DRE) of PFCs from the etch chamber exhaust stream was measured as
a function of abatement system input power, feed composition, etch tool
parameters, and abatement gas flow rate. In particular, water vapor and
oxygen as abatement additive gases were compared. Preliminary cost of
ownership (COO) calculations determine fixed capital and installation costs
as well as yearly operating and maintenance costs.

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