SEMATECH DOC ID #: 98113599A-ENG

Title: Design of Recycling System for Spent Rinse Water in Sandia's Microelectronics Development Laboratory

Author(s): Dennis J. Morrison;Robert P. Donovan;Robert P. Timon;

Document date: 11/30/1998

Descriptor(s): ultrapure water;rinse tanks;risk assessment;wastewater treatment;wet stations;

Abstract:  This report describes a project to design, install, and operate a system to
recycle rinse waters discharged from wet benches. Using a single-tank system,
representative properties--particularly total oxidizable carbon (TOC),
nonvolatile residue (NVR), and dissolved silica--of the water collected for
recycling were measured. Response times of the analyzers that measured these
properties were correlated with transit times between fab wet benches and the
collection tank. The quality of weekend rinse water, overnight water, and
production-time water was also compared.

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