SEMATECH DOC ID #: 98103579A-XFR

Title: SEMATECH Equipment Installation Sign-off Procedure

Author(s): Erik Kunz;

Document date: 10/16/1998

Descriptor(s): equipment installation;equipment safety;procedures;equipment design;computer software;

Abstract:  The Equipment Installation Sign-off Procedure uses various checklist tools
that guide SEMATECH personnel through reviews of semiconductor manufacturing
equipment installation projects at pre-defined stages of the design and
installation. Such reviews provide an opportunity for SEMATECH personnel to
verify that required environment, safety, and health (ESH) and regulatory
compliance elements are in place before starting up equipment. The Equipment
Installation Checklist that corresponds to this procedure aids in proactively
identifying deficiencies in the design and installation while establishing
accountability for the completion of outstanding items in a timely manner.
Additionally, the checklist serves as documentation of individual equipment
installation projects that is archived for future reference. This document
includes the checklist in Microsoft Word format, which users can modify to
suit their company situation. This document also includes an application
guide that describes key sections of the Equipment Installation Checklist.

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