SEMATECH DOC ID #: 98063534D-ENG

Title: CIM Global Joint Guidance for 300 mm Semiconductor Factories: Release Five

Author(s): I300I;J300;

Document date: 04/18/2000

Descriptor(s): CIM;300 mm wafers;productivity analysis;factory cost analysis;equipment performance;safety;

Abstract:  This document was assembled by the International 300 mm Initiative (I300I) and
Japan 300 mm Semiconductor Technology Conference (J300) consortia to provide
joint consensus for and to semiconductor industries and silicon suppliers. It
extends the existing joint consensus guidelines into Computer Integrated
Manufacturing (CIM) and complements those guidelines published for carriers,
equipment configuration, equipment operation, and facilities. These CIM
guidelines are designed to integrate automation software systems with other
key factory capabilities to ensure that the industry fully realizes potential
300 mm productivity benefits.

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