SEMATECH DOC ID #: 98053508A-TR

Title: Current State of Technology: Perfluorocompound (PFC) Emissions Reduction

Author(s): Albert Cheng;Jenna Latt;Jim Harrison;Jim Jewett;John Davison;Julie Unruh Rapp;Laurie Beu;Paul Thomas Brown;Tina Gilliland;Tom Tamayo;Walter Worth;

Document date: 06/01/1998

Descriptor(s): perfluorocompounds;global climate change;plasma chemical vapor deposition;chamber cleaning;process optimization;emissions reduction;

Abstract:  This report summarizes the status of research and development efforts
undertaken by the semiconductor industry to reduce emissions of
perfluorocompounds (PFCs). Strategies include process optimization,
alternative chemistries for chamber cleans and etch in both installed based
and future tools, capture/recovery, and abatement. The appendix describes 41
technologies that have been examined.

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