SEMATECH DOC ID #: 98043497A-XFR

Title: Optimization of Moisture and Thermal Mechanical End of Line Monitors (EOLMs)

Author(s): Robert Alexander;

Document date: 04/30/1998

Descriptor(s): equipment reliability;process monitors;control equipment;cost analysis;

Abstract:  This document outlines the application of a ten-step approach to evaluating
moisture and thermal mechanical end-of-line monitors (EOLMs) in an effort to
optimize their reliability.

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