SEMATECH DOC ID #: 98023468C-TR

Title: I300I Factory Guideline Compliance: Factory Integration Maturity Assessment (FIMA) for 300 mm Production Equipment: Version 4.01

Author(s): Eddy Bass;Lorn Christal;Steve Fulton;

Document date: 02/28/2000

Descriptor(s): 300 mm wafers;wafer size conversion;equipment performance;productivity analysis;

Abstract:  This document is a revised version of the pre-existing FIMA version 4.0
release. This version has been modified into a modular format to allow for
segregated assessments of 300 mm equipment sub-assemblies and other
associated focus areas. This document contains procedures, inquiries, and
corresponding pass/fail criteria to be used during an equipment maturity
assessment (EMA) to evaluate compliance to the guidance, standards, and
requirements detailed in the I300I Factory Guidelines: Version 4.0. It
describes the assessment method as well as the pass/fail criteria; a
worksheet for performing the assessment is also included.

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