SEMATECH DOC ID #: 97113407A-ENG

Title: Silicon Test Wafer Specification for 180 nm Technology

Author(s): Randy Goodall;

Document date: 12/01/1997

Descriptor(s): 300 mm wafers;silicon;specifications;

Abstract:  This document describes silicon wafer specifications suitable for
International 300 mm Initiative (I300I) 180 nm demonstrations in 1998. The
specifications were developed in conjunction with the I300I Silicon Working
Group and SEMI standards.

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