SEMATECH DOC ID #: 97113406A-ENG

Title: Unified Equipment Performance Metrics for 0.25 Micron Technology

Author(s): I300I;Selete;

Document date: 12/01/1997

Descriptor(s): 300 mm wafers;equipment performance;cost of ownership;0.25 micron;wafer size conversion;

Abstract:  The Unified Equipment Performance Metrics for 0.25 Micron Technology
represents consensus between I300I, Selete, and their respective member
companies. All of the 15 equipment types discussed by I300I and Selete now
have unified metrics which represent the 1998 production standard. Values for
defects have been agreed upon using 0.20 micron and 0.12 micron defect sizes.
Cost Resource Model (CRM) data has been aligned. Suppliers are expected to
demonstrate equipment performance to metrics.

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