SEMATECH DOC ID #: 97093366A-XFR

Title: GEM Specification Manual: The GEM Specification as Viewed from the Host

Author(s): Kensuke Uriga;

Document date: 12/23/1997

Descriptor(s): standards;CIM;generic equipment model;Japan;manufacturing systems;specifications;

Abstract:  This document is designed to acquaint software engineers with the challenges
and advantages of implementing the Generic Equipment Model(GEM)(SEMI standard
E30)in semiconductor factories. Written from the standpoint of a factory host
computer, it is targeted especially for Japan's semiconductor industry, which
has not shown wide acceptance of GEM. It contains extensive GEM instructions,
background, and scenarios. Appendix A includes the results of a survey of
Japanese manufacturers and suppliers regarding their interest in, and use of,
GEM.

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