SEMATECH DOC ID #: 97063311G-ENG

Title: I300I Factory Guidelines: Version 5.0

Author(s): Jackie Ferrell;Margaret Pratt;

Document date: 04/20/2000

Descriptor(s): 300 mm wafers;productivity analysis;equipment performance;safety;factory cost analysis;CIM;standards;

Abstract:  Version 5.0 of the International 300 mm Initiative (I300I) Factory Guidelines
includes all of the guidelines contained in versions 3.0, 4.0, 4.1, and 4.2
(i.e., including computer integrated manufacturing [CIM], backend, reticle
handling, and person guided vehicles [PGV] guidelines). A single bar in the
margins of this document indicates additions and updates included in version
5.0. Version 5.0 adds three new CIM guidelines for Production Equipment
Performance by Type (4.1.8) , Actual Processing Time (4.1.9), and AMHS
Equipment Performance Information (4.6.2). In addition to the new CIM
Guidelines, the non-product wafer guideline 1.1.7.4 was updated. New terms
from the new sections were added to the glossary, and all references to
standards were updated. E99 was added as a standard reference in 4.2.6,
4.2.7, and 4.2.8. E79 was added as a standards reference in 1.1.2.1. The CIM
guidelines have been generated in cooperation with J300E.

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