SEMATECH DOC ID #: 97063306A-TR

Title: 300 mm Test Wafer Specifications for 0.25 Micron Technology

Author(s): Randy Goodall;

Document date: 06/27/1997

Descriptor(s): 300 mm wafers;specifications;

Abstract:  0.25 um targeted test wafer specifications suggested by I300I for use in 1997
are detailed. Use of, and exceptions to, SEMI standards are noted.

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