97063298A-XFR Abstract: I300I Guidelines on 300 mm Process Tool Mechanical Interfaces for Wafer Lot Delivery, Buffering, and Loading (Rev. D, 9/3/96)

SEMATECH DOC ID #: 97063298A-XFR

Title: I300I Guidelines on 300 mm Process Tool Mechanical Interfaces for Wafer Lot Delivery, Buffering, and Loading (Rev. D, 9/3/96)

Author(s): Randy Goodall;

Document date: 06/11/1997

Descriptor(s): 300 mm wafers;wafer carriers;

Abstract: This document consists of specifications for wafer carriers and tool material
handling interfaces for the International 300 mm Initiative (I300I).

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