97063297B-XFR Abstract: Demonstration Test Method

SEMATECH DOC ID #: 97063297B-XFR

Title: Demonstration Test Method - Revision 1

Author(s): David Carswell;Steve Fulton;

Document date: 09/30/1997

Descriptor(s): equipment;test methods;reliability testing;

Abstract: Revision 1 of the Demonstration Test Method (DTM) incorporates the experience
of deploying the DTM in multiple tests and reflects the changing requirements
for 1998 and 180 nm processes. The International 300 mm Initiative (I300I)
DTM is a guideline for characterizing process performance and reliability of
semiconductor IC process and metrology equipment at any development maturity.
It provides a method for experimentation scaled to the maturity of the tool
or process being tested. The DTM is composed of three stages: determine the
maturity of the tool or process to be tested, select and execute the
appropriate testing, and report the test results in a standardized format.
The original version of the DTM is still available as TT #97063297A-XFR. It
will be used for all 1997 demonstrations.

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