SEMATECH DOC ID #: 97063295A-XFR

Title: Metrology Tool Gauge Study Procedure for the International 300 mm Initiative (I300I)

Author(s): Dan Iversen;

Document date: 06/10/1997

Descriptor(s): procedures;analysis of variance;measuring instruments;equipment performance;300 mm wafers;gauge capability;

Abstract:  This document defines the purpose and describes the procedures for performing
a gauge study to characterize the accuracy of metrology tools. It also
describes how to document the data derived from the gauge study.

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