SEMATECH DOC ID #: 97043272A-TR

Title: Accelerated Life Testing of Gas System Performance and Reliability

Author(s): Alexander Glew;Andrew Johnson;Jeff Riddle;Jim Ammenheuser;Mark Crockett;Robin Binder;William Dax;

Document date: 06/02/1997

Descriptor(s): accelerated testing;equipment reliability;gas distribution systems;gas flow;gas pressure;mass flow controllers;particle generation;pressure measurement;regulators;

Abstract:  This document reports the results of an investigation into the effects of
purity, materials, and surface finish on gas system performance. Three
different selections of materials, each with three different gas grades, were
tested. Experiments demonstrated the utility of this accelerated gas system
test method. Rapid cycling allowed a 190 times mechanical acceleration over
normal use. Based on a dosage response model, the 10 ppm moisture level
allowed a 100 times corrosion acceleration factor over standard 100 ppb gas
systems. Further results showed that standard 10 u-in Ra max. gas components
performed well over the equivalent of 12 years of cycling and six years of
corrosion in HBr application at 100 ppb of moisture. In fact, in this
experiment they performed as well as the ultra clean and advanced alloys.

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