SEMATECH DOC ID #: 97023237A-TR

Title: Guidelines for Simulator-Based Control System Testing

Author(s): Francis Ruppel;Wes Wysor;

Document date: 05/06/1997

Descriptor(s): control systems;failure testing;simulation;

Abstract:  This report introduces a simulator-based technique for testing semiconductor
equipment control systems. Use of this technique, which originally was used
in other industries and had been adapted to the semiconductor industry, could
mitigate up to 30% of failures associated with semiconductor equipment
control system software. This document includes case studies of simulators
being used to test control systems, plus a survey of nine commercial
simulation systems characterized by industry requirements. The report
concludes that the effort required to implement a simulation with worthwhile
return on investment (ROI) may be less than generally believed.

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