97013236A-ENG Abstract: Destruction of Volatile Organic Compound (VOC) Emissions by Photocatalytic Oxidation (PCO): Final Report (ESHC003)

SEMATECH DOC ID #: 97013236A-ENG

Title: Destruction of Volatile Organic Compound (VOC) Emissions by Photocatalytic Oxidation (PCO): Final Report (ESHC003)

Author(s): Avtar S. Jassal;Edward J. Wolfrum;Robert Rabago;

Document date: 02/19/1997

Descriptor(s): photocatalytic oxidation;cost of ownership;VOC abatement;volatile organic compounds;

Abstract: This report summarizes the experimental activities at National Renewable
Energy Laboratory (NREL) and at KSE to investigate the use of photocatalytic
oxidation (PCO) as a volatile organic compound (VOC) control technology for
point-of-use (POU) application in the semiconductor industry. It contains the
results of laboratory-scale testing using an NREL-developed photocatalyst as
well as experiments using proprietary KSE photocatalysts and presents
estimates of the cost of ownership (COO) of PCO for POU applications.

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