SEMATECH DOC ID #: 96103192A-ENG

Title: Standard Stocker Environmental Characterization Method

Author(s): Duane Peterson;Eric Christie;

Document date: 11/21/1996

Descriptor(s): acoustic properties;design of experiments;equipment characterization;humidity;particulate contamination;static pressure;stockers;temperature;vibration monitoring;

Abstract:  This document describes design of experiment (DOE) methods that provide a
starting point for developing a test plan for stocker characterizations. By
following the characterization plan outlined in this document, a test
engineer can assess the environmental impact and cleanliness characteristics
of a stocker. Each test can be completed independently and can be used to
generate design and procurement specification data to automation engineers
who are ordering new equipment or designing manufacturing layouts. Included
in this report are data on particular equipment models and graphics showing
locations of various measurements.

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