SEMATECH DOC ID #: 96073156B-ENG

Title: Tool Perfluorocompound (PFC) Emissions Data Report

Author(s): Walter Worth;

Document date: 12/18/1997

Descriptor(s): emissions;perfluorocompounds;gases;etching;chamber cleaning;by-product characterization;

Abstract:  This report documents the results of a project to gather process-specific
perfluorocompound (PFC) emissions data from commonly used tools to help
SEMATECH's member companies determine their PFC emissions baseline. A variety
of chamber cleaning and etch processes was analyzed. Electron impact
ionization (EI) quadrapole mass spectrometry (QMS) was used to test for
perfluoromethane (CF4), perfluoroethane (C2F6), sulfur hexafluoride (SF6),
nitrogen trifluoride (NF3), trifluoromethane (CHF3), and perfluoropropane
(C3F8). PFC byproducts were also identified and quantified. This revision is
a nonconfidential version of the original report.

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