SEMATECH DOC ID #: 96063138C-ENG

Title: Radio Frequency (RF) Measurement and Control Project Report (TECQ001)

Author(s): Charlie Nowlin;Gil Yetter;Tony Moore;Travis Spratlin;

Document date: 09/09/1998

Descriptor(s): 

Abstract:  This document is a revision of 96063138B-ENG. It describes the technical
achievements of the Plasma Etch Technology Radio Frequency (RF) Power
Measurement and Control Project (TECQ001), which spanned two years from mid-
1994 to mid-1996. The document details the conception, design, development,
and prototyping of an advanced concept RF power delivery system, which
incorporates new technologies. Background information, detailed circuitry and
component designs, and mathematical examinations are included. Additional
reduction-to-practice assembly and circuit tuning information can be obtained
by contacting the SEMATECH project manager or the SEMATECH Calibration
Laboratory. Revision C changes the classification of the document from
SEMATECH Confidential Restricted to SEMATECH Non-Confidential and includes a
Foreword describing the technical developments for which SEMATECH has applied
for patents.

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