96063137A-ENG Abstract: SEMATECH Design Guidelines for Gas Box Components

SEMATECH DOC ID #: 96063137A-ENG

Title: SEMATECH Design Guidelines for Gas Box Components

Author(s): Jeff Riddle;Jim Ammenheuser;

Document date: 07/11/1996

Descriptor(s): components;cost of ownership;fluid distribution systems;specifications;

Abstract: This document is designed as a manufacturer's guideline for standardizing
components for gas boxes, which represent a substantial part of the cost of
process tools used in semiconductor manufacturing. The document provides
specifications for electrical and mechanical characteristics for the most
common components of a typical gas box: valves, mass flow controllers (MFCs)
and mass flow meters (MFMs), regulators, filters and purifiers, and pressure
transducers. The information in this guide is intended to benefit SEMATECH
member companies in working with suppliers toward meeting the goal of
reducing fluid and gas systems cost of ownership (COO) by 20% in future
fabrication facilities. The guidelines are represented in drawings and
tables. This document is in development as an industry standard by
Semiconductor and Equipment Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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