SEMATECH DOC ID #: 95123035A-TR

Title: Advanced Equipment Controller (AEC) Preliminary Requirements and Functional Capabilities, Version 1.0

Author(s): John Pace;

Document date: 01/18/1996

Descriptor(s): Advanced Equipment Controller;advanced process control;specifications;CIM;standards;

Abstract:  This document defines preliminary requirements and functional capabilities
for an Advanced Equipment Controller (AEC) system for use in semiconductor
process tools. These requirements and specifications are based on industry
publications, seminars, discussions, and interviews with process engineers
and other professionals.

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