SEMATECH DOC ID #: 95113016A-TR

Title: Virtual Factory Equipment Interface (VFEI): Version 2.2

Author(s): Frank Yeager;

Document date: 11/30/1995

Descriptor(s): Strategic Cell Controller;virtual factory equipment interface;control systems;

Abstract:  This document describes version 2.2 of the Virtual Factory Equipment
Interface (VFEI) for semiconductor manufacturing systems. This release
contains updates and corrections to the prior version. Sections 1.3 and 1.4
of this document summarize the changes from version 2.1 to version 2.2. The
document includes descriptions of SEMATECH Baseline Requirements, VFEI
concepts, VFEI commands, VFEI predefined events, VFEI predefined data
variables, and VFEI predefined error codes. Syntax is provided for
implementing VFEI commands when used with ASCII messaging systems.

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