SEMATECH DOC ID #: 95092976A-ENG

Title: Comparative Analysis of a Silane Cylinder Delivery System and a Bulk Silane Installation (ESHB001)

Author(s): James Beasley;Kathy Meissner;Marcelo Viera;Michael Visokey;Nasar Chowdhury;

Document date: 10/26/1995

Descriptor(s): silane;bulk gases;gas distribution systems;cost analysis;specifications;equipment safety;

Abstract:  This document presents the results of one of the tasks of the Silane Safety
Improvement project (ESHB001), which conducted a comparative analysis of a
silane cylinder and bulk silane delivery system that addresses cost of
ownership, safety, and risk. It is meant to provide a benchmark status of
existing bulk silane systems and compare them to information documented in
the S71 Silane Safety Improvement survey. It will provide data for planners
and management to evaluate the benefits and risks associated with bulk silane
installations and make technical data-based decisions to meet current and
future needs for the semiconductor industry.

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