SEMATECH DOC ID #: 95082926B-ENG

Title: Equipment Interface Characterization Test Procedures

Author(s): Jeff Acklen;

Document date: 05/02/1996

Descriptor(s): generic equipment model;equipment characterization;equipment specifications;testing;computer software;procedures;

Abstract:  This updated document contains checklists to be used by engineers to evaluate
manufacturing equipment communications interface software that is compliant
with the Semiconductor Equipment Communications Standard (SECS). The document
is intended to be used with both Generic Equipment Model (GEM) and non-GEM
compliant equipment and includes interface-pertinent documentation.
Checklists are intended for use with simulation software such as GEMVS or
PROTOCOL from LPA Software, Inc., or GEMTEST.PRO and SECSIM Pro from GW
Associates. This technology transfer includes an electronic copy of this
document in Word 6.0 for Windows and automated scripts that run on
two commercial products: GW Associates SECSSIM/Pro software and LPA Protocol
software.

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