SEMATECH DOC ID #: 95072900A-ENG

Title: Facility Fluids Metrics and Test Methods

Author(s): Deborah Franke;Jeff Riddle;

Document date: 08/10/1995

Descriptor(s): test methods;standards;purity;test equipment;specifications;

Abstract:  This technology transfer was prepared by the Research Triangle Institute (RTI)
as part of SEMATECH's Facility Fluids Project (S100). It is a compilation of
information on existing facility fluids metric and test methods. Information
on standard methods was gathered from SEMATECH and SEMI. Other information was
obtained from a literature search of journals and conference proceedings. The
published information primarily is concerned with the test equipment used and
what levels of detection and purity were found. Many of the articles
discussed the use of new equipment, either commercial or experimental.
Extensive annotated bibliographies are appended to the report.

To Document

© Copyright 2009 SEMATECH, Inc.
Please read these important Trademark and legal notices