SEMATECH DOC ID #: 95042797A-ENG

Title: SEMATECH Inspection/Review Specific Equipment Model (ISEM)

Author(s): Jim Tamulonis;

Document date: 04/27/1995

Descriptor(s): automation;CIM;generic equipment model;equipment modeling;inspection;operational modeling;standards;

Abstract:  This document describes the SEMATECH Inspection/Review Specific Equipment
Model (ISEM). The model is designed to help integrate inspection and review
equipment into an automated semiconductor factory. This is done by defining
an operational model that provides a standard host interface and equipment
operational behavior. The document also provides references, definitions,
requirements, models, commands, scenarios, and other modeling material. This
document is in development as an industry standard by SEMI (Semiconductor
Equipment and Materials International). When available, adherence to the SEMI
standard is recommended.

This document has been superceded by SEMI Standard E30.1.

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