SEMATECH DOC ID #: 95042793A-ENG

Title: SEMATECH Metrology Specific Equipment Model (MSEM)

Author(s): D. Therrien;J. Morrissey;J. Panner;J. Tamulonis;R. Mangieri;T. Conly;

Document date: 05/04/1995

Descriptor(s): metrology;automation;CIM;generic equipment model;equipment modeling;operational modeling;standards;

Abstract:  This document provides a specific equipment model for metrology equipment
(MSEM), and is designed to help integrate metrology equipment into an
automated semiconductor factory. The model does this by defining an
operational model that in turn provides a standard host interface and
equipment operational behavior. The document also provides references,
definitions, requirements, models, commands, scenarios, and other modeling
material. This document is in development as an industry standard by SEMI
(Semiconductor Equipment and Materials International). When available,
adherence to the SEMI standard is recommended.

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