SEMATECH DOC ID #: 95042782A-ENG

Title: SEMATECH Stepper Specific Equipment Model (SEM)

Author(s): Chuck Lambson;David Russo;Jim Reath;Jim Tamulonis;Tim Sexton;

Document date: 05/04/1995

Descriptor(s): operational modeling;generic equipment model;steppers;automation;CIM;standards;

Abstract:  This document provides a Specific Equipment Model for stepper equipment
(SSEM), and is designed to help integrate stepper equipment into an automated
semiconductor factory. The model does this by defining an operational model
that in turn provides a standard host interface and equipment operational
behavior. The document also provides references, definitions, requirements,
models, commands, scenarios, and other modeling material. This document is in
development as an industry standard by SEMI (Semiconductor Equipment and
Materials International). When available, adherence to the SEMI standard is
recommended.

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