SEMATECH DOC ID #: 94102567A-STD

Title: Device Interoperability Guideline for Sensors, Actuators, and Controllers

Author(s): Joe White;

Document date: 02/16/1995

Descriptor(s): interoperability standards;sensors;actuators;object oriented systems;equipment specifications;

Abstract:  This document is a proposed Semiconductor Equipment and Materials
International (SEMI) standard designed to define a framework for
interoperability of devices that are interconnected on a sensor/actuator
network and used in semiconductor processing equipment. The proposed standard
uses general principles of the open system interconnection (OSI) basic
reference model, which subdivides standardization for interconnection and
interoperability into layers of specification. This document also is being
published by SEMI as Document 2250A.

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