94022208A-XFR Abstract: Development of Standard Outgassing Techniques for Detecting Volatile Organic Compounds from Polymer Materials Used in Microenvironments

SEMATECH DOC ID #: 94022208A-XFR

Title: Development of Standard Outgassing Techniques for Detecting Volatile Organic Compounds from Polymer Materials Used in Microenvironments

Author(s): Alan Liang;Dale McIntyre;Gene Feit;Richard Lujan;Steve Thornberg;Susan F. A. Bender;

Document date: 04/07/1994

Descriptor(s): contamination free manufacturing;microenvironments;polymers;test methods;outgassing;desorption;volatile organic compounds;

Abstract: This document is a summary of the work performed in 1993 by the Contamination
Free Manufacturing (CFM) Research Center to develop standard, high sensitivity
(less than 1 ppm) techniques to detect outgassing of volatile organic
compounds (VOCs) from polymers typically used to construct microenvironments.
These tests provide standard testing methods for making relative judgments on
the outgassing threat of polymeric materials. The tests may be proposed as a
SEMASPEC standard. Results from using thermal desorption with cryofocussing
collection, gas chromatography/ mass spectroscopy (TD/GC/MS) and thermal
desorption with Flame Ionization Detection (TD/FID) techniques to evaluate
VOCs from polycarbonate materials are reported. A brief review of the
literature on the cleanroom sources of VOCs and their impact is also provided.

To Document