93031573B-STD Abstract: SEMASPEC GEM Purchasing Guidelines 2.0

SEMATECH DOC ID #: 93031573B-STD

Title: SEMASPEC GEM Purchasing Guidelines 2.0

Author(s): Jim Tamulonis;

Document date: 11/10/1994

Descriptor(s): CIM;contracts;control systems;equipment characterization;generic equipment model;specifications;standards;

Abstract: This document is an update of SEMASPEC GEM Purchasing Guidelines, Technology
Transfer #93031573A-STD, published in spring 1993. The current document
consists of Generic Equipment Model (GEM) standard guidelines recommended for
inclusion in all member company purchase specifications for semiconductor
process and metrology equipment. This document lists equipment interface
standard reference documents, defines terminology, addresses buyer
requirements, and outlines supplier responses. Appendixes include forms for
Buyer GEM requirements and supplier GEM compliance; templates for a Specific
Equipment Model (SEM) and additional capability requirements; and a sample GEM
documentation outline.

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