SEMATECH DOC ID #: 93021511A-STD

Title: SEMASPEC Test Method for Determination of Particle Contribution by Filters in Gas Distribution Systems

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): particle generation;test methods;gas distribution systems;filters;

Abstract:  This document describes a test method designed to draw statistically
significant comparisons of particulate generation performance of filters
tested under aggressive conditions. This procedure utilizes a condensation
nucleus counter (CNC) applied to in-line gas filters typically used in
semiconductor applications. It applies to membrane and metal filters of
various types 1/4 in. through 1/2 in. in size. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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