SEMATECH DOC ID #: 93021510A-STD

Title: SEMASPEC Test Method for Determination of Particle Contribution by Low Pressure Regulators in Gas Distribution Systems

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): particle generation;test methods;gas distribution systems;pressure regulators;

Abstract:  This test method is designed to draw statistically significant comparisons of
particulate generation performance of low pressure regulators tested under
aggressive conditions. The procedure uses a condensation nucleus counter
(CNC) applied to in-line gas pressure regulators typically used in
semiconductor applications. It applies to automatic and manual pressure
regulators of various types 1/4 in. through 1/2 in. in size. This document is
in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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