92071233B-STD Abstract: SEMASPEC Provisional Test Method for Determining the Corrosion Resistance of Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071233B-STD

Title: SEMASPEC Provisional Test Method for Determining the Corrosion Resistance of Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This test method is intended to help differentiate between mass flow
controller (MFC) designs on the basis of relative resistance to
corrosion-induced failure. The method describes a corrosive gas exposure test
for MFCs. The test is intentionally aggravated to accelerate the test while
simulating conditions that may be found within process equipment gas systems
in the semiconductor industry. The MFC is operated during the test. As the
relationship between corrosion and performance may differ with MFC design,
corrosion is not measured directly. The effects of corrosion are detected by
observing changes in MFC calibration and other operating parameters. This
test is intended only for MFCs manufactured for use in HCl or a similar
corrosive gaseous environment. This revision of the document incorporates
changes made as a result of industry review and from corrections made during
working session four of the MFC Test Methods Development Task Force. This
document is in development as an industry standard by Semiconductor Equipment
and Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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