SEMATECH DOC ID #: 92071232B-STD

Title: SEMASPEC Provisional Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (MFCs) (Mounting Position)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract:  This test method describes an attitude sensitivity test for mass flow
controllers (MFCs). The MFC is operated during the test, and changes in
calibration between the vertical and horizontal orientations of the device are
monitored. This characteristic is measured at both low and high input
pressure. This revision of the document incorporates changes made as a result
of industry review and from corrections made during working session four of
the MFC Test Methods Development Task Force. This document is in development
as an industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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