92071231B-STD Abstract: SEMASPEC Provisional Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071231B-STD

Title: SEMASPEC Provisional Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This document presents a test method that may be applied to evaluate the
susceptibility of the mass flow controller electronics to electromagnetic
interference (EMI). The test method covers both the radiated susceptibility
and the conducted susceptibility of the controller where exposed to EMI. The
electromagnetic susceptibility requirements are extracted from MIL-STD-461C
and SAMA PMC-33.1, and the test method is a composite of the RS03, CS01, CS02,
and CS06 test methods defined in MIL-STD 462. The test method is not designed
for AC-powered MFCs. It addresses electromagnetic susceptibility of MFCs
through DC power leads and control signals. This revision of the document
incorporates changes made as a result of industry review and from corrections
made during working session four of the MFC Test Methods Development Task
Force. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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