92071230B-STD Abstract: SEMASPEC Provisional Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071230B-STD

Title: SEMASPEC Provisional Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This document defines a test method for characterizing mass flow controllers
(MFCs) being considered for installation into a high-purity gas distribution
system. The procedure applies to thermal MFCs. It is intended to measure the
delivered mass flow rate variation as a function of deviation from the
reference steady-state supply voltage. The test method is designed for DC
powered MFCs. The supply voltage effects include voltage-depression and
over-voltage variations in the DC supply. This test method is not designed
for AC-powered MFCs. This test method addresses steady-state effects and does
not address any effects caused by transient power suppy behavior. This
revision of the document incorporates changes made as a result of industry
review and from corrections made during working session four of the MFC Test
Methods Development Task Force. This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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