92071229B-STD Abstract: SEMASPEC Provisional Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071229B-STD

Title: SEMASPEC Provisional Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. This test method measures the upstream (inlet) and downstream
(outlet) transient pressure influences on indicated and actual flow. The
method yields the results of actual output flow versus MFC set-point and
indicated flow as influenced by steady state inlet pressure. The method
applies to MFCs with maximum flow ranges of up to 30 slpm. This revision of
the document incorporates changes made as a result of industry review and from
corrections made during working session four of the MFC Test Methods
Development Task Force. This document is in development as an industry
standard by Semiconductor Equipment and Materials International (SEMI).
When available, adherence to the SEMI standard is recommended.

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