92071228B-STD Abstract: SEMASPEC Provisional Test Method for Determining Mass Flow Controller (MFC) Performance Characteristics from Ambient and Gas Temperature Effects

SEMATECH DOC ID #: 92071228B-STD

Title: SEMASPEC Provisional Test Method for Determining Mass Flow Controller (MFC) Performance Characteristics from Ambient and Gas Temperature Effects

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: The purpose of this document is to define a method for testing mass flow
controllers (MFCs) being considered for installation into a high-purity gas
distribution system and to quantify ambient and gas temperature effects on the
MFC's indicated and actual flow. The method applies to metal and
polymer-sealed MFCs with flow rates up to 30 slpm. The tests include:
Ambient Temperature Effects (Steady State and Transient) and Gas Temperature
Effects (Steady State and Transient). This revision of the document
incorporates changes made as a result of industry review and from corrections
made during working session four of the MFC Test Methods Development Task
Force. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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