92071227B-STD Abstract: SEMASPEC Provisional Test Method for Determining Moisture, Oxygen, and Total Hydrocarbon Contribution/Retention by Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071227B-STD

Title: SEMASPEC Provisional Test Method for Determining Moisture, Oxygen, and Total Hydrocarbon Contribution/Retention by Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. The document describes a test method that yields statistically
significant comparisons of moisture, oxygen, and hydrocarbon contamination for
MFCs under test conditions. The document is designed such that tests for
moisture, oxygen, and hydrocarbons may or may not be performed individually.
This revision of the document incorporates changes made as a result of
industry review and from corrections made during working session four of the
MFC Test Methods Development Task Force. This document is in development as
an industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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