92071226B-STD Abstract: SEMASPEC Provisional Test Method for Determining Particle Contribution by Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071226B-STD

Title: SEMASPEC Provisional Test Method for Determining Particle Contribution by Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. The method is used to measure particle contribution by MFCs to
high-purity gas systems by yielding statistically significant comparisons of
particle contribution among MFCs under test conditions. This revision of the
document incorporates changes made as a result of industry review and from
corrections made during working session four of the MFC Test Methods
Development Task Force. This document is in development as an industry
standard by Semiconductor Equipment and Materials International (SEMI). When
available, adherence to the SEMI standard is recommended.

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