92071225B-STD Abstract: SEMASPEC Provisional Test Method for Verification of Calibration Accuracy and Calculation of Conversion Factors for a MFC Using Surrogate Gases

SEMATECH DOC ID #: 92071225B-STD

Title: SEMASPEC Provisional Test Method for Verification of Calibration Accuracy and Calculation of Conversion Factors for a MFC Using Surrogate Gases

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. The method quantifies the accuracy and linearity of an MFC when
mapping an MFC's calibration from one specific gas to another. It also
quantifies the flow dependence of an MFC's conversion factor. This revision
of the document incorporates changes made as a result of industry review and
from corrections made during working session four of the MFC Test Methods
Development Task Force. This document is in development as an industry
standard by Semiconductor Equipment and Materials International (SEMI). When
available, adherence to the SEMI standard is recommended.

To Document