SEMATECH DOC ID #: 92071224B-STD

Title: SEMASPEC Provisional Test Method for Determining Reliability of a Mass Flow Controller (MFC)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract:  This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. The document describes a method to help determine the ability of an
MFC to meet the manufacturer's published specifications over its lifetime.
This revision of the document incorporates changes made as a result of
industry review and from corrections made during working session four of the
MFC Test Methods Development Task Force. This document is in development as
an industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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