92071223B-STD Abstract: SEMASPEC Provisional Test Method for Determining Warm-up Time of Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071223B-STD

Title: SEMASPEC Provisional Test Method for Determining Warm-up Time of Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. The purpose of this method is to provide a standardized method for
quantifying the warm-up time of a mass flow controller (MFC). The test
conditions in this method are intended to simulate benchtop warm-up, with an
MFC that has been equalized to ambient conditions for 24 hours before the
application of power. Due to a wide range of manufacturing variability,
warm-up times vary widely for the same model of MFC. This specification
addresses a method for taking a single data point repetitively from the same
MFC. Resulting data will show exactly how warm-up effects change the
delivered flow of that particular MFC. This revision of the document
incorporates changes made as a result of industry review and from corrections
made during working session four of the MFC Test Methods Development Task
Force. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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